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• Safety design (Enclosure) • SS316L VIM/VAR • Applied material according to specialised gas • 100% EP Internal Surface • Particle free • Leakage Rate: 1 X 〖10〗^(-9) Atm-cc/sec (He) • Maintain high purity during operation • PLC controller & touch panel • Easy operation & maintenance • Full Auto Cycle process • Safety Interlock • Free voltage • Display: EL Mono or TFT Colour • Com: RS-232C, 422, 485, Ethernet